top of page

W6

Recent Advances in TCAD
9:30 - 13:00
ROOM VICTORIA

CHAIRS

Zlatan Stanojevic (Global TCAD Solutions, AT)

ABSTRACT

Technology Computer-Aided Design (TCAD) continues to play a central role in semiconductor development, linking device physics, process technology, and circuit performance. This half-day workshop presents a curated snapshot of recent advances, combining emerging methodologies with selected high-impact applications. The first part focuses on foundational developments, including the transition of quantum transport methods into industrial workflows and the growing role of AI-driven surrogate modeling for accelerating complex simulations and enabling efficient design space exploration. The second part highlights key applications of TCAD that illustrate its breadth, including modeling of 3D NAND memory operation, advances in transport modeling at cryogenic temperatures, and the integration of TCAD into Design-Technology Co-Optimization (DTCO). While inherently selective, the workshop reflects key directions in which TCAD is evolving, from advanced physics and AI-enhanced modeling to application-driven innovation and circuit integration.

PROGRAM

09:30 – 10:00

NEGF Simulations in the Industrial Setting: From Quantum Transport to Technology Enablement

Alfonso Sanchez-Soares (TouCAD Ltd, IE)

As device dimensions, material stacks, and operating regimes continue to push beyond the limits of semiclassical transport models, the non-equilibrium Green’s function (NEGF) formalism is becoming increasingly relevant not only for exploratory research, but also for practical industrial TCAD workflows. This talk will discuss what it takes to bring NEGF simulations to industrial settings, moving beyond research-level development toward a practical technology that can support device engineering decisions. Emphasis will be placed on how quantum-transport simulations can support the analysis and design of advanced nanoscale devices, while also providing a physically grounded basis for parameterising semiclassical transport models within multiscale simulation workflows. The presentation will also address the gap between advanced methods and product-ready software, highlighting challenges in usability, calibration, automation, and deployment, and arguing that industrial-grade NEGF tools can become a key enabler for next-generation device design in the near future.

​

10:00 – 10:30

AI Models for Sensor Meta Surfaces

Denis Rideau (ST Microelectronics, FR)

Designing large-scale optical meta-surfaces remains a major computational challenge due to the complex electromagnetic interactions arising from subwavelength nanostructures. While meta-surfaces offer a powerful route toward ultra-thin, high-performance optical components, their design at millimeter scale is often impractical with conventional finite-difference time-domain (FDTD) simulations because of the associated computational cost.  This tutorial introduces an AI-driven design framework that leverages convolutional neural network emulators to accelerate and improve meta-surface development. Neural network enables fast surrogate modeling of electromagnetic responses while preserving the fidelity needed to capture complex interactions beyond local approximations. By integrating these emulators with gradient-based optimization and generative design strategies, the framework supports efficient exploration of large design spaces and scalable inverse design of millimeter-scale meta-surface optics. The tutorial highlights how neural network technologies can significantly reduce simulation time, improve design accuracy, and unlock new opportunities for scalable, high-performance meta-surface engineering.

​

10:30 – 11:00

Interactively Controllable Surrogate Modeling for Fab Technology Co-Optimization

Stephania Carapezzi (Silvaco, US)

Physics-based design flow has been a key driver of the semiconductor industry for many years, developed primarily by expert users through an iterative trial-and-error process. However, rapid technology scaling has increased fab process and device-design complexity, expanding the optimization space to a scale that is increasingly difficult to explore efficiently. Nowadays, Machine learning (ML) and artificial intelligence (AI) are emerging as essential technical enhancements to conventional design flows. In this talk, I will discuss the use of surrogate modelling in the context of AI-powered platform Fab Technology Co-Optimization (FTCO™). FTCO addresses the bottlenecks of advanced semiconductor development including exponential parameter complexity, multi-week calibration cycles, and siloed decision-making through the building of deployable surrogate models. By combining physical simulation with smart Design-of-Experiments and AI-powered calibration, optimization and analysis, FTCO heavily relies on surrogate models to maximize design space exploration while hiding underlying complexity behind an intuitive, interactive interface. The use of physics-based surrogate models helps also to remove barriers to entry for non-simulation engineers by making physics-based modelling accessible through fast, user-friendly predictive tools, allowing simulation to have a greater impact throughout an organization. Engineers across simulation, fab integration, and technology teams gain immediate sensitivity insight, robust process window definition, and accelerated multi-objective optimization—ultimately compressing time-to-market and improving yield confidence for next-generation semiconductor technologies.

​

11:00 - 11:30

Coffee break

 

11:30 – 12:00

How Does Flash Memory Actually Work? Understanding Charge‑Trap 3D NAND Operation Through Modeling.

Devin Verreck (imec, BE)

3D NAND flash is the most common non-volatile memory technology today, yet its memory operation is still not fully understood. In this workshop, we present a modeling framework that provides physical insight into incremental step pulse programming (ISPP) in charge‑trap-layer flash cells. We first discuss a physics‑based TCAD model that explicitly accounts for carrier energy relaxation during high‑field injection, resolving discrepancies between simulations and experimental characteristics. Next, we introduce a complementary semianalytical model that captures the balance between charge injection, trapping, and escape with significantly reduced computational complexity. Together, these models are used to identify and explain the distinct regimes of the ISPP curve and to understand the physical factors that govern programming efficiency in advanced 3D NAND devices.

 

12:00 – 12:30

Challenges for Drift-Diffusion Modeling at Cryogenic Temperatures: Numerics, Stabilization, Freeze-out, Band Tailing and Traps

Christoph Jungemann (RWTH Aachen, DE)

Quantum computers and other applications require CMOS devices operated at 4K and below. Drift-Diffusion simulations at these temperatures are very challenging for various reasons beyond numerical under- and overflow. The electron gas is degenerate, and the Scharfetter-Gummel stabilization must be replaced either by an approximation or by a numerical solution of the corresponding ODE. We have developed a public-domain software package that provides a numerically exact and stable solution of the ODE and can handle arbitrary density-of-states including band tailing. Freeze-out of dopants requires detailed modeling of the related generation/recombination rates including the Poole-Frenkel effect and tunneling. Electron transport in the channel is much more complex than at room temperature due to the stronger impact of interface traps, band tailing etc. leading to hopping and tunneling-assisted transport near threshold, and thus complex models for the drift mobility are required. Due to these detrimental effects standard measurement techniques to determine parameters of MOS devices do not work or require extensive simulations to extract the parameters. For example, an AC amplitude of 50mV applied to the gate results at room temperature in a linear response, which can be handled by small-signal analysis.  At 4K, on the other hand, the response is strongly nonlinear requiring a transient or harmonics-balance simulation to extract the fundamental signal. Furthermore, simple 1D devices structures (e.g. MOS caps) do not work due to freeze-out, and 2D or 3D effects cannot be neglected. We have therefore developed a 3D drift-diffusion model that is numerically stable at 4K under stationary, small-signal and transient conditions. Simulations at 4K reveal transients at time scales which are much larger than at room temperature.

 

12:30 – 13:00

Design-Technology Co-Optimization: physical accuracy that scales to the circuit level

Franz Schanovsky (Global TCAD Solutions, AT)

Design-Technology Co-Optimization (DTCO) is mission-critical for advancing modern semiconductor nodes. The simulation workflows used in DTCO strive to combine high physical accuracy with a turn-around-time (TAT) that makes the comparison of different design pathways feasible. This presentation provides a comprehensive overview of the practical methodologies used in DTCO. We demonstrate the full simulation hierarchy, starting from the physical basis up to the circuit level extraction of target figures of merit. The presented workflow seamlessly integrates TCAD and SPICE simulations to achieve fast TAT for different scenarios, including performance prediction and variability. The goal is to give the participants an idea of the place of the DTCO methodology within the standard EDA design flow, featuring relevant real-world applications in technology development.

BIOSKETCHES

 

Zlatan Stanojevic studied Microelectronics at the Vienna University of Technology where he received his MSc and PhD degrees in 2009 and 2016, respectively. he is the Chief Technology Officer (CTO) of Global TCAD Solutions (GTS), an independent European TCAD software vendor, where he supervises the company’s R&D activities. His research interests include process and device TCAD, semi-classical and quantum modeling of carrier transport effects in low-dimensional structures, Design-Technology Co-Optimization, as well as simulator design and numerical algorithms. He is the lead designer of the commercially successful GTS Nano Device Simulator (NDS), a Subband-Boltzmann-Transport-based device simulator. He has also co-supervised the development of the parasitics extraction engine PEX, part of GTS Cell Designer, and the GTS ProSim process simulation software.

​

Alfonso Sanchez-Soares is a co-founder of TouCAD Ltd., where he contributes to the development of TCAD software for semiconductor device simulation. He received his Ph.D. in Physics from the Tyndall National Institute, Ireland, and his work has focused on modelling materials and semiconductor devices for advanced nanoscale technologies. His experience includes collaborative projects with industrial partners such as Intel and TSMC, with a particular emphasis on bringing quantum-mechanical methods closer to practical technology development. His current interests include NEGF methods, multiscale modelling, and simulation workflows for next-generation electronic devices.

​

Denis Rideau received a Ph.D. degree in Physics from the University of Orsay, France in 2001, and an Engineering degree at ESIEE, Paris in 1996. He is now performing TCAD and optical simulations at STMicroelectronics, Crolles in France. His research interests are modelling and simulation of semiconductor nanodevices, with emphasis on quantum effects, alternative channel materials and transport properties in advanced devices. He is currently working on the design and the modelling of advanced optical sensors and metasurfaces-based systems.

 

Stefania Carapezzi is currently Field Application Engineer (FAE) at Silvaco, a leading provider of software solutions for semiconductor and photonics design, including TCAD, EDA software, and SIP solutions that enable semiconductor design and digital twin modeling through AI software and innovation. In her role she provides expert consultation, timely training and support to TCAD users by understanding their complex problems and roadmap(s), with special reference to the area of Design of Experiments and Machine Learning / Artificial Intelligence applied to TCAD generated data to boost physical-based design flows. She received her M.Sc. degree in Physics in 2010 and her Ph.D. degree in Physics in 2014 from University of Bologna, Bologna, Italy. Then, she stayed at the Advanced Research Center on Electronic System, Bologna, Italy from 2015 to 2019, where she was involved in developing TCAD models for nano-scaled transistors, such as short channel double-gate III-V MOSFETs, and suspended carbon nanotube FET. Finally, she was Post-Doc Researcher at CNRS, Montpellier, France, from 2020 to 2023, conducting research on TCAD modelling of vanadium-dioxide relaxation oscillators for applications in neuromorphic circuits.

​

Devin Verreck is a Principal Member of Technical Staff in the TCAD group at imec, Belgium, where his research focuses on the modeling and optimization of 2D‑material-based field-effect transistors and advanced 3D NAND flash memory technologies. He received his MSc in Nanotechnology in 2012 and his PhD in Electrical Engineering in 2017 from KU Leuven (summa cum laude with the highest honors). Since 2023, he has also served as a professor at KU Leuven, where he teaches courses on advanced nanodevices. Dr. Verreck is a regular contributor to leading journals and international conferences on future CMOS scaling and flash memory operation modeling, including SISPAD, SSDM, IEDM, and ISSCC, and holds several patents in the areas of exploratory logic devices and advanced memory technologies.

​

Christoph Jungemann is the head of the Institute of Electromagnetic Theory at RWTH Aachen University. He received his PhD in electrical engineering in 1995 at RWTH, the venia legendi (habilitation) for electromagnetic theory in 2001 at the University of Bremen and is an IEEE Fellow since 2019. His research focuses on semiclassical modeling of semiconductor devices including MOSFETs, III-V and SiGe HBTs, power devices etc. He has worked on drift-diffusion, hydrodynamic and Boltzmann transport equation-based models for stationary, small-signal, transient and noise simulation, for which he develops numerical algorithms. In addition to development of models for transport processes, he works on the extraction of model parameters from measurements by simulation.

​

Franz Schanovsky studied electrical engineering and microelectronics at the Technische Universität Wien, receiving the degree of Diplomingenieur in January 2008. He received his PhD in microelectronics in March 2013 from the Technische Universität Wien for his work on the atomistic modelling of bias temperature instabilities in MOS oxides. He joined Global TCAD Solutions (GTS) as a full-time senior scientist in April 2016 where he took over the development of the MinimosNT semi-classical device simulator, extending and refining its capabilities and performance. During his time at GTS, he has been actively involved in several research projects, most notably on charge-trapping-based flash memories. Today he heads the development of the GTS device simulators as Director of Device Simulation.​​

​

bottom of page